Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions

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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip

Recipe used: Ti etch

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	Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip		Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip