LabAdviser/Technology Research/Microfabrication of Hard x-ray Lenses: Difference between revisions
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===Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses=== | ===Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses=== | ||
Stöhr F, Wright J, Simons H, Michael-Lindhard J, Hübner J, Jensen F, Hansen O and Poulsen H F. 2015 Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses. Journal of Micromechanics and Microengineering 25(12), 125013 LINK | Stöhr F, Wright J, Simons H, Michael-Lindhard J, Hübner J, Jensen F, Hansen O and Poulsen H F. 2015 Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon X-ray lenses. Journal of Micromechanics and Microengineering 25(12), 125013 [http://dx.doi.org/10.1088/0960-1317/25/12/125013 LINK] | ||
===Injection molded polymeric hard X-ray lenses=== | ===Injection molded polymeric hard X-ray lenses=== | ||