Specific Process Knowledge/Etch/DRIE-Pegasus/StandardRecipes: Difference between revisions
No edit summary |
|||
| Line 1: | Line 1: | ||
'''Feedback to this page: | '''Feedback to this page: | ||
[mailto:plasma@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/StandardRecipes click here]''' | [mailto:plasma@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/StandardRecipes click here]''' | ||
<!--Checked for updates on 3/2-2016 - ok/jmli --> | |||
== Overview of the standard processes: Processes A, B, C, D and SOI == | == Overview of the standard processes: Processes A, B, C, D and SOI == | ||