Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Electron Beam Exposure</big>''' | '''<big>Electron Beam Exposure</big>''' | ||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | *[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | ||
* Literature on E-beam Writers and Lithography | |||
** [http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication] | |||
** [http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Lithography, Wiley, 2011] | |||