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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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*Spin coating of SU-8 resists
*Spin coating of SU-8 resists
*Spin coating of PGMEA based AZ resists
*Spin coating of PGMEA based AZ resists
*Spin coating of wafers with structured backside
*Edge bead removal
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!style="background:silver; color:black;" align="center" width="60"|Resist  
!style="background:silver; color:black;" align="center" width="60"|Resist  
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