Specific Process Knowledge/Lithography: Difference between revisions
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=Training= | =Training= | ||
<span style="background:#FF2800">THIS SECTION IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | <span style="background:#FF2800">THIS SECTION IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | ||
{| style="color: black;" width="90%" | |||
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'''<big>Literature</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
'''<big>Spin Coating</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
'''<big>UV Exposure</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
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'''<big>Electron Beam Exposure</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
'''<big>Deep-UV Exposure</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
'''<big>Development</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
'''<big>Post Processing</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
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'''<big>UV Resists</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
'''<big>OM Inspection</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | |||
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