Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]</big>''' | |||
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | *[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | ||
*[[Specific Process Knowledge/Lithography/Pretreatment#BHF|BHF]] | *[[Specific Process Knowledge/Lithography/Pretreatment#BHF|BHF]] | ||
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*[[Specific_Process_Knowledge/Lithography/Coaters/SprayCoater|Spray Coater]] | *[[Specific_Process_Knowledge/Lithography/Coaters/SprayCoater|Spray Coater]] | ||
'''<big>[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]</big>''' | |||
*[[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|KS Aligner]] | *[[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|KS Aligner]] | ||
*[[Specific Process Knowledge/Lithography/UVExposure#Aligner-6inch|Aligner-6inch]] | *[[Specific Process Knowledge/Lithography/UVExposure#Aligner-6inch|Aligner-6inch]] | ||
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'''<big>[[Specific Process Knowledge/Lithography/EBeamLithography|Electron Beam Exposure]]</big>''' | |||
*[[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ|JEOL JBX-9500FSZ]] | *[[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ|JEOL JBX-9500FSZ]] | ||
'''<big>[[Specific Process Knowledge/Lithography/UVExposure|Deep-UV Exposure]]</big>''' | |||
*[[Specific Process Knowledge/Lithography/DUVStepper#DUV Stepper FPA-3000EX4 from Canon|DUV Stepper FPA-3000EX4 from Canon]] | *[[Specific Process Knowledge/Lithography/DUVStepper#DUV Stepper FPA-3000EX4 from Canon|DUV Stepper FPA-3000EX4 from Canon]] | ||
'''<big>[[Specific Process Knowledge/Lithography/Baking|Baking]]</big>''' | |||
*[[Specific Process Knowledge/Lithography/Baking#Hotplates|Hotplates]] | *[[Specific Process Knowledge/Lithography/Baking#Hotplates|Hotplates]] | ||
*[[Specific Process Knowledge/Lithography/Baking#Ovens|Ovens]] | *[[Specific Process Knowledge/Lithography/Baking#Ovens|Ovens]] | ||
'''<big>[[Specific Process Knowledge/Lithography/Development|Development]]</big>''' | |||
*[[Specific Process Knowledge/Lithography/Development#Developer-1 and Developer-2|Developer-1 and Developer-2]] | *[[Specific Process Knowledge/Lithography/Development#Developer-1 and Developer-2|Developer-1 and Developer-2]] | ||
*[[Specific Process Knowledge/Lithography/Development#Developer-6inch|Developer-6inch]] | *[[Specific Process Knowledge/Lithography/Development#Developer-6inch|Developer-6inch]] | ||
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'''<big>[[Specific Process Knowledge/Lithography/Strip|Strip]]</big>''' | |||
*[[Specific Process Knowledge/Lithography/Strip#Plasma Asher 1|Plasma Asher 1]] | *[[Specific Process Knowledge/Lithography/Strip#Plasma Asher 1|Plasma Asher 1]] | ||
*[[Specific Process Knowledge/Lithography/Strip#Plasma Asher 2|Plasma Asher 2]] | *[[Specific Process Knowledge/Lithography/Strip#Plasma Asher 2|Plasma Asher 2]] | ||
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*[[Specific Process Knowledge/Lithography/Strip#Fine Acetone Strip|Fine Acetone Strip]] | *[[Specific Process Knowledge/Lithography/Strip#Fine Acetone Strip|Fine Acetone Strip]] | ||
'''<big>[[Specific Process Knowledge/Lithography/LiftOff|Lift-off]]</big>''' | |||
*[[Specific Process Knowledge/Lithography/LiftOff#LiftOffWetBench|Lift-off Wet Bench]] | *[[Specific Process Knowledge/Lithography/LiftOff#LiftOffWetBench|Lift-off Wet Bench]] | ||
*[[Specific Process Knowledge/Lithography/LiftOff#LiftOff(4",6")|Lift-off (4", 6")]] | *[[Specific Process Knowledge/Lithography/LiftOff#LiftOff(4",6")|Lift-off (4", 6")]] | ||
'''<big>[[Specific_Process_Knowledge/Lithography/NanoImprintLithography|NanoImprint Lithography]]</big>''' | |||
*[[Specific Process Knowledge/Thin film deposition/MVD|Molecular Vapour Deposition]] | *[[Specific Process Knowledge/Thin film deposition/MVD|Molecular Vapour Deposition]] | ||
*[[Specific Process Knowledge/Lithography/NanoImprintLithography#EVG NIL|EVG NIL]] | *[[Specific Process Knowledge/Lithography/NanoImprintLithography#EVG NIL|EVG NIL]] | ||
'''<big>3D Lithography</big>''' | |||
*[[Specific Process Knowledge/Lithography/3DLithography#2-Photon Polymerization|2-Photon Polymerization]] | *[[Specific Process Knowledge/Lithography/3DLithography#2-Photon Polymerization|2-Photon Polymerization]] | ||