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| ===[[Specific Process Knowledge/Lithography/Strip|Stripping Resist]]=== | | ===[[Specific Process Knowledge/Lithography/Strip|Stripping Resist]]=== |
| ===[[Specific Process Knowledge/Lithography/LiftOff|Lift-off]]=== | | ===[[Specific Process Knowledge/Lithography/LiftOff|Lift-off]]=== |
|
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| =UV Lithography Equipment=
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|
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| {| style="color: black;" width="70%"
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| | colspan="2" |
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| |-
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| | style="width: 50%"|
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| ===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]===
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| *[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]]
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| *[[Specific Process Knowledge/Lithography/Pretreatment#Buffered HF-Clean|BHF]]
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| *[[Specific Process Knowledge/Lithography/Pretreatment#Oven_250C|Oven 250C]]
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|
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| ===[[Specific Process Knowledge/Lithography/Coaters|Coaters]]===
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| *[[Specific Process Knowledge/Lithography/Coaters#SSE Spinner|SSE Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]]
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| *[[Specific Process Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Polymers)|Manual Spinner (Polymers)]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner 1 (Laurell)|Manual Spinner 1 (Laurell)]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Spin coater: Manual Labspin|Spin coater: Manual Labspin]]
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| *[[Specific_Process_Knowledge/Lithography/Coaters/SprayCoater|Spray Coater]]
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|
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| ===[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]===
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| *[[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|KS Aligner]]
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| *[[Specific Process Knowledge/Lithography/UVExposure#Aligner-6inch|Aligner-6inch]]
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| *[[Specific Process Knowledge/Lithography/UVExposure#III-V Aligner|III-V Aligner]]
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| *[[Specific Process Knowledge/Lithography/UVExposure#Inclined UV Lamp|Inclined UV Lamp]]
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| | style="width: 50%"|
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|
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|
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| ===[[Specific Process Knowledge/Lithography/Baking|Baking]]===
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| *[[Specific Process Knowledge/Lithography/Baking#Hotplates|Hotplates]]
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| *[[Specific Process Knowledge/Lithography/Baking#Ovens|Ovens]]
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|
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| ===[[Specific Process Knowledge/Lithography/Development|Development]]===
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| *[[Specific Process Knowledge/Lithography/Development#Developer-1 and Developer-2|Developer-1 and Developer-2]]
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| *[[Specific Process Knowledge/Lithography/Development#Developer-6inch|Developer-6inch]]
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| *[[Specific Process Knowledge/Lithography/Development#SU8-Developer|SU8-Developer]]
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| *[[Specific Process Knowledge/Lithography/Development#Developer-TMAH|Developer-TMAH]]
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| *[[Specific_Process_Knowledge/Lithography/Development#Developer_TMAH_UV-lithography|Developer TMAH UV-lithography]]
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|
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| ===[[Specific Process Knowledge/Lithography/Strip|Strip]]===
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| *[[Specific Process Knowledge/Lithography/Strip#Plasma Asher 1|Plasma Asher 1]]
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| *[[Specific Process Knowledge/Lithography/Strip#Plasma Asher 2|Plasma Asher 2]]
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| *[[Specific Process Knowledge/Lithography/Strip#III-V Plasma Asher|III-V Plasma Asher]]
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| *[[Specific Process Knowledge/Lithography/Strip#Rough Acetone Strip|Rough Acetone Strip]]
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| *[[Specific Process Knowledge/Lithography/Strip#Fine Acetone Strip|Fine Acetone Strip]]
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|
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| ===[[Specific Process Knowledge/Lithography/LiftOff|Lift-off]]===
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| *[[Specific Process Knowledge/Lithography/LiftOff#Lift-off wet bench|Lift-off wet bench]]
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| *[[Specific Process Knowledge/Lithography/LiftOff#Lift-off (4", 6")|Lift-off (4", 6")]]
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