Specific Process Knowledge/Wafer cleaning/RCA: Difference between revisions
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|'''Life time of the chemical solutions''' | |'''Life time of the chemical solutions''' | ||
|Can only be heated one time. When hot: it lasts for ~ | |Can only be heated one time. When hot: it lasts for ~1h | ||
|Can only be heated one time. When hot: it lasts for ~ | |Can only be heated one time. When hot: it lasts for ~1h | ||
|~2 months | |~2 months | ||
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*Silicon oxide | *Silicon oxide | ||
*Silicon nitride | *Silicon nitride | ||
*Quartz wafers | *Quartz wafers/fused silica | ||
| | | | ||
*Silicon | *Silicon | ||
*Silicon oxide | *Silicon oxide | ||
*Silicon nitride | *Silicon nitride | ||
*Quartz wafers | *Quartz wafers/fused silica | ||
| | | | ||
*Silicon | *Silicon | ||
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|'''Batch size''' | |'''Batch size''' | ||
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1-25 4" or 6" wafers at a time | 1-25 2",4" or 6" wafers at a time | ||
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1-25 4" or 6" wafers at a time | 1-25 2",4" or 6" wafers at a time | ||
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1-25 4" or 6" wafers at a time | 1-25 2",4" or 6" wafers at a time | ||
|- | |- | ||
|'''Size of substrate''' | |'''Size of substrate''' | ||
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4"-6" wafers | 2"-4"-6" wafers | ||
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4"-6" wafers | 2"-4"-6" wafers | ||
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4"-6" wafers | 2"-4"-6" wafers | ||
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|} | |} | ||