Specific Process Knowledge/Wafer cleaning/RCA: Difference between revisions
| Line 51: | Line 51: | ||
| | | | ||
30 sec. | 30 sec. | ||
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|'''Life time of the chemical solutions''' | |||
|One time heating. When hot: it lasts for ~1½h | |||
|One time heating. When hot: it lasts for ~1½h | |||
|~2 months | |||
|- | |- | ||
|'''Allowed materials''' | |'''Allowed materials''' | ||