Specific Process Knowledge/Wafer cleaning/RCA: Difference between revisions
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|'''Size of substrate''' | |'''Size of substrate''' | ||
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4"-6" wafers | |||
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4"-6" wafers | 4"-6" wafers | ||
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| Line 77: | Line 77: | ||
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|'''Size of substrate''' | |'''Size of substrate''' | ||
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4"-6" wafers | |||
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4"-6" wafers | 4"-6" wafers | ||