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Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions

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0.0002 mm
0.0002 mm
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Y-axis single error
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
1.2(W[µm]-5µm)
0.003 or less
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