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| |-valign="top" | | |-valign="top" |
| |'''Index accuracy''' | | |'''Index accuracy''' |
| |not known | | | |
| |not known | | | |
| |- valign="top" | | |- valign="top" |
| |'''Wavelength range''' | | |'''''' |
| |400-1000 nm | | | |
| |300-950 nm | | | |
| |-valign="top" | | |-valign="top" |
| |'''What kind of thin films can be measured''' | | |'''''' |
| |Any film that is transparent to the light in the given wavelength range | | | |
| ex:
| | | |
| *Silicon Oxide
| |
| *Silicon nitride
| |
| *PolySilicon
| |
| *Photoresists
| |
| *SU8
| |
| *Other polymers
| |
| *Very thin layers of metals (<20 nm)
| |
| *and many more
| |
| |Any film that is transparent to the light in the given wavelength range | |
| ex:
| |
| *Silicon Oxide
| |
| *Silicon nitride
| |
| *Very thin layers of PolySilicon
| |
| *Photoresists
| |
| *SU8
| |
| *Other polymers
| |
| *Very thin layers of metals (<20 nm)
| |
| *and many more
| |
| |- | | |- |
| |} | | |} |