Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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*Silicon wafers (new from the box or RCA cleaned) | *Silicon wafers (new from the box or RCA cleaned) | ||
*From A2 furnace directly (e.g. incl. Predep HF) | *From A2 furnace directly (e.g. incl. Predep HF) | ||
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