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Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions

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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"| <b>Lifetime scanner MDPmap </b>
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!style="background:silver; color:black;" align="center" width="60"|Purpose  
!style="background:silver; color:black;" align="center" width="60"|Purpose  

Revision as of 11:02, 16 November 2015

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Lifetime scanner MPDmap, positioned in cleanroom D-3.


The user manual, control instruction, the user APV and contact information can be found in LabManager:

Lifetime scanner MPDmap info page in LabManager,


Performance information

Equipment performance and process related parameters

Equipment Lifetime scanner MDPmap
Purpose
  • Carrier Lifetime
  • Photoconductivity
Location
  • D-3
Performance Resolution
Instrument specifics Detector
  • Microwave detector
Laser
  • 405 nm
    • Power 5 mW to 100 mW
  • 978 nm
    • Power 5 mW to 140 mW
  • 975 nm
    • Power 0.5 W to 4.0 W
  • Spot diameter for all laser 0.5 µm
Substrates Batch size
  • Sample sizs between 5 mm x 5 mm up to 16" or 210 mm x 210 mm
  • Sample thickness 10 µm to 20 mm
Allowed materials
  • Any standard cleanroom materials.
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