Specific Process Knowledge/Characterization/Lifetime scanner MDPmap

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Lifetime scanner MPDmap, positioned in cleanroom D-3.

The user manual, control instruction, the user APV and contact information can be found in LabManager:

Lifetime scanner MPDmap info page in LabManager,

Equipment performance and process related parameters

Equipment
Purpose		Carrier Lifetime Photoconductivity
Location		D-3
Performance	Resolution
Instrument specifics	Detector	Microwave detector
	Laser	405 nm Power 5 mW to 100 mW 978 nm Power 5 mW to 140 mW 975 nm Power 0.5 W to 4.0 W Spot diameter for all laser 0.5 µm
Substrates	Batch size	Sample sizs between 5 mm x 5 mm up to 16" or 210 mm x 210 mm Sample thickness 10 µm to 20 mm
	Allowed materials	Any standard cleanroom materials.