Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions

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*Carrier Lifetime
*Photoconductivity
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!style="background:silver; color:black;" align="center" width="60"|Location  
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*D-3
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!style="background:silver; color:black;" align="center" width="60"|Performance
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*
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics
!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics
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*405 nm
**Power 5 mW to 100 mW
*978 nm
**Power 5 mW to 140 mW
*975 nm
**Power 0.5 W to 4.0 W
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|style="background:LightGrey; color:black"|Electron source
|style="background:LightGrey; color:black"|Electron source

Revision as of 10:41, 16 November 2015

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Lifetime scanner MPDmap, positioned in cleanroom D-3.


The user manual, control instruction, the user APV and contact information can be found in LabManager:

Lifetime scanner MPDmap info page in LabManager,


Performance information

Equipment performance and process related parameters

Equipment
Purpose
  • Carrier Lifetime
  • Photoconductivity
Location
  • D-3
Performance Resolution
Instrument specifics Detector
Laser
  • 405 nm
    • Power 5 mW to 100 mW
  • 978 nm
    • Power 5 mW to 140 mW
  • 975 nm
    • Power 0.5 W to 4.0 W
Electron source
Operating pressures
Options
Substrates Batch size
  • 1 100 mm wafer
  • 1 150 mm wafer
  • 1 200 mm wafer (not full view)
  • Smaller samples
Allowed materials
  • Any standard cleanroom materials.