Revision as of 10:15, 16 November 2015

THIS PAGE IS UNDER CONSTRUCTION

Feedback to this page: click here

The user manual, control instruction, the user APV and contact information can be found in LabManager:

Lifetime scanner MPDmap info page in LabManager,

Performance information

Equipment performance and process related parameters

Equipment
Purpose
Location
Performance	Resolution
Instrument specifics	Detector
	Stage
	Electron source
	Operating pressures
	Options
Substrates	Batch size	1 100 mm wafer 1 150 mm wafer 1 200 mm wafer (not full view) Smaller samples
	Allowed materials	Any standard cleanroom materials.

@@ Line 2: / Line 2: @@
 '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]'''
+[[image:IMG_3290.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom D-3.]]
+'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''
+[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=169 Lifetime scanner MPDmap info page in LabManager],
+== Performance information ==
+==Equipment performance and process related parameters==
+{| border="2" cellspacing="0" cellpadding="2"
+!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
+|style="background:WhiteSmoke; color:black"|
+|-
+!style="background:silver; color:black;" align="center" width="60"|Purpose
+|style="background:LightGrey; color:black"|
+|style="background:WhiteSmoke; color:black"|
+|-
+!style="background:silver; color:black;" align="center" width="60"|Location
+|style="background:LightGrey; color:black"|
+|style="background:WhiteSmoke; color:black"|
+|-
+!style="background:silver; color:black;" align="center" width="60"|Performance
+|style="background:LightGrey; color:black"|Resolution
+|style="background:WhiteSmoke; color:black"|
+|-
+!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics
+|style="background:LightGrey; color:black"|Detector
+|style="background:WhiteSmoke; color:black"|
+|-
+|style="background:LightGrey; color:black"|Stage
+|style="background:WhiteSmoke; color:black"|
+|-
+|style="background:LightGrey; color:black"|Electron source
+|style="background:WhiteSmoke; color:black"|
+|-
+|style="background:LightGrey; color:black"|Operating pressures
+|style="background:WhiteSmoke; color:black"|
+|-
+|style="background:LightGrey; color:black"|Options
+|style="background:WhiteSmoke; color:black"|
+|-
+!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
+|style="background:LightGrey; color:black"|Batch size
+|style="background:WhiteSmoke; color:black"|
+*1 100 mm wafer
+*1 150 mm wafer
+*1 200 mm wafer (not full view)
+*Smaller samples
+|-
+| style="background:LightGrey; color:black"|Allowed materials
+|style="background:WhiteSmoke; color:black"|
+*Any standard cleanroom materials.
+|-
+|}