Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
| Line 35: | Line 35: | ||
*1 atm | *1 atm | ||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"| | |style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Gasses on the system | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*H<math>_2</math> | *H<math>_2</math> | ||
*O<math>_2</math> | *O<math>_2</math> | ||
*N<math>_2</math> | *N<math>_2</math> | ||
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!style="background:silver; color:black" align="left"|Substrates | !style="background:silver; color:black" align="left"|Substrates | ||