Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||
|style="background:LightGrey; color:black"|Drive-in of boron, oxidation and annealing ||style="background:WhiteSmoke; color:black"|Oxidation: | |style="background:LightGrey; color:black"|Drive-in of boron, oxidation of silicon and boron phase layer and annealing of the oxide||style="background:WhiteSmoke; color:black"|Oxidation: | ||
*Dry | *Dry | ||
*Wet: with torch (H<math>_2</math>+O<math>_2</math>) | *Wet: with torch (H<math>_2</math>+O<math>_2</math>) | ||