Specific Process Knowledge/Characterization/SEM LEO: Difference between revisions
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This SEM will cover most users need. It is a very reliable and rugged instrument that provides high quality images of most samples. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the SEM. | This SEM will cover most users need. It is a very reliable and rugged instrument that provides high quality images of most samples. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers may be acquired on the SEM. | ||
The SEM is is equipped with a Raith e-beam writing system. | The SEM is is equipped with a Raith e-beam writing system. This system requires a special training. | ||
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*[[/SEM comparison tablel|SEM comparison table]] | *[[/SEM comparison tablel|SEM comparison table]] | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||