Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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# Study the logbook for the e-beam writer: sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program. | # Study the logbook for the e-beam writer: sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program. | ||
# Study the manual for the machine, it can be found [[Specific_Process_Knowledge/Lithography/EBeamLithography/JBX9500Manual|here]] | # Study the manual for the machine, it can be found [[Specific_Process_Knowledge/Lithography/EBeamLithography/JBX9500Manual|here]] | ||
''' Prepare a process flow''' | ''' Prepare a process flow''' | ||