Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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''Sequence names, process parameters, and test results (Sequence no. 0000-0999):'' | ''Sequence names, process parameters, and test results (Sequence no. 0000-0999):'' | ||
*'''(0401) DCH 100mm HMDS Standard''' | *'''(0401) DCH 100mm HMDS Standard''' | ||
*'''(0601) DCH 150mm HMDS Standard''' | |||
VPO temperature: 120°C <br> | VPO temperature: 120°C <br> | ||
Process parameters: 30s vacuum bake @ -0.67 bar, HMDS injection, 90s reaction @ ambient, 20s cooling @ 21°C. | Process parameters: 30s vacuum bake @ -0.67 bar, HMDS injection, 90s reaction @ ambient, 20s cooling @ 21°C. | ||
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*''' (0402) DCH 100mm HMDS | *''' (0402) DCH 100mm HMDS Fast''' | ||
*''' (0602) DCH 100mm HMDS Fast''' | |||
VPO temperature: 120°C <br> | VPO temperature: 120°C <br> | ||
Process parameters: 30s vacuum bake @ -0.67 bar, HMDS injection, 15s reaction @ ambient, 20s cooling @ 21°C. | Process parameters: 30s vacuum bake @ -0.67 bar, HMDS injection, 15s reaction @ ambient, 20s cooling @ 21°C. | ||