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Specific Process Knowledge/Lithography/UVLithography: Difference between revisions

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[[File:UVLPic1.png|400px|right]]
[[File:UVLPic1.png|400px|right]]


[[File:UVLPic2.png|200px|right]]


* '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates [[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]].
* '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates [[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|in this table]].
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* '''Development''': Choose which equipment you wish to use to develop your photoresist from [[Specific_Process_Knowledge/Lithography/Development|this]] list.
* '''Development''': Choose which equipment you wish to use to develop your photoresist from [[Specific_Process_Knowledge/Lithography/Development|this]] list.


[[File:UVLPic2.png|200px|right]]
 


* '''Specify whether you wish to strip or lift-off your resist''': [[Specific_Process_Knowledge/Lithography/Strip|strip]] and [[Specific_Process_Knowledge/Lithography/LiftOff|lift-off]].
* '''Specify whether you wish to strip or lift-off your resist''': [[Specific_Process_Knowledge/Lithography/Strip|strip]] and [[Specific_Process_Knowledge/Lithography/LiftOff|lift-off]].