Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
| Line 5: | Line 5: | ||
This furnace is the uppermost furnace tube in the furnace A-stack positioned in cleanroom 2. The A-stack together with furnace C1 are the cleanest of all our furnaces. Please be aware of which substrates are allowed to enter this furnace. Check the cross contamination chart. If you are in doubt, please ask one from the furnace team. | This furnace is the uppermost furnace tube in the furnace A-stack positioned in cleanroom 2. The A-stack together with furnace C1 are the cleanest of all our furnaces. Please be aware of which substrates are allowed to enter this furnace. Check the cross contamination chart. If you are in doubt, please ask one from the furnace team. | ||
==Process knowledge== | |||
*Boron drive-in: look at the [[Process Knowledge/Thermal Process/Dope with Boron|Dope with Boron]] page | |||
*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | |||
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | |||
<br clear="all" /> | <br clear="all" /> | ||