Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride: Difference between revisions
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Revision as of 12:10, 7 October 2015
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Deposition of Aluminium Nitride
Write a short description of the process and how to perform the process.
Only one method at the moment
Cryofox PVD co-sputter/evaporation | |
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Generel description |
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Stoichiometry |
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Film Thickness |
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Deposition rate |
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Step coverage |
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Process Temperature |
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Substrate size |
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Allowed materials |
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