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Specific Process Knowledge/Etch/III-V RIE/III V RIE ETCHES: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891, Bureaucrats, danchip, Administrators
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!
*CH<sub>4</sub>-flow: 8.4 sccm,  
*CH<sub>4</sub>-flow: 8.4 sccm,  
*H<msub>2</sub>-flow: 42 sccm,
*H<sub>2</sub>-flow: 42 sccm,
*Power = 60 W,
*Power = 60 W,
*Vbias = 450 V,
*Vbias = 450 V,
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