Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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schd sdfname Final compilation of sdf, jdf and v30-files, creates a mgn-file | schd sdfname Final compilation of sdf, jdf and v30-files, creates a mgn-file | ||
schd -exptim sdfname Final compilation of sdf, jdf and v30-files, creates a mgn-files and states the writing time estimate | schd -exptim sdfname Final compilation of sdf, jdf and v30-files, creates a mgn-files and states the writing time estimate | ||