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Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

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[[Image:A3_furnace_100_Si_wet_oxidation.jpg]]
[[Image:A3_furnace_100_Si_wet_oxidation.jpg]]
==Furnace <100>-Si Dry Oxidation===
[[Image:Furnace_100_Si_dry_oxidation.jpg]]
===Furnace <111>-Si Dry Oxidation===
[[Image:Furnace_111_Si_dry_oxidation.jpg]]
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