Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres: Difference between revisions
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The Peak Fit table is shown below. The two Si2p spin-orbit doublets (the bulk and the oxide) are referred to as Scan A and B. The various fitting parameters for each of the four peaks are shown in the table along with their constraints. Under each peak is a row with the constraints (in bold) that are to be applied to the parameters. | The Peak Fit table is shown below. The two Si2p spin-orbit doublets (the bulk and the oxide) are referred to as Scan A and B. The various fitting parameters for each of the four peaks are shown in the table along with their constraints. Under each peak is a row with the constraints (in bold) that are to be applied to the parameters. | ||
<span id="anchor_peaktable1"></span> | <span id="anchor_peaktable1"></span> | ||
[[File:XPS-basics19.jpg|700px]] | [[File:XPS-basics19.jpg|700px]] | ||