Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
No edit summary |
|||
| Line 15: | Line 15: | ||
The purpose of the Multipurpose annealing furnace is annealing and dry oxidation of different samples and resist pyrolysis. Annealling and resist pyrolysis can be done in vaccum or at atmospheric pressure, in a N<sub>2</sub>, H<sub>2</sub> or a mixture of the two gasses. | The purpose of the Multipurpose annealing furnace is annealing and dry oxidation of different samples and resist pyrolysis. Annealling and resist pyrolysis can be done in vaccum or at atmospheric pressure, in a N<sub>2</sub>, H<sub>2</sub> or a mixture of the two gasses. | ||
All process gasses (except purge nitrogen) are heated heated, before they are introduced into the furnace at the door side. | |||
Is is possible to change all quartz ware in the furnace (the furnace tube, the door sealing and the wafer boat). A the moment Danchip is has three different sets of quartz ware: | Is is possible to change all quartz ware in the furnace (the furnace tube, the door sealing and the wafer boat). A the moment Danchip is has three different sets of quartz ware: | ||