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Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres: Difference between revisions

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The green square holds the information on how to correct for the background. In this case we will use the 'Shirley' background with default settings.
The green square holds the information on how to correct for the background. In this case we will use the 'Shirley' background with default settings.
Click 'Add Doublet' once and the Si2p doublet will be added.
[[File:XPS-basics14.jpg|700px]]
A table with peak fitting parameters emerge above the spectrum. The Si2p spin-orbit couple is labelled Scan A. The details of the fitting is not discussed here.
Also, in the upper part of the spectrum the residuals of the fitting are shown.
To add the oxide peak, move the centre bar onto the oxide peak (this is why it is a good idea to have both peaks in the same spectrum) - in this case at around 102.8 eV binding energy.
Cick 'Add Doublet' to add the oxide peak.
[[File:XPS-basics15a.jpg|700px]]
Swithc to the other tab labelled 'Fit Peaks' in the 'Peak Fitting' window. Here, a button labelled 'Fit All Levels' will apply the fitting parameters to all levels (supposing several levels are available). Upon completion of the fitting routine, press 'Accept' and 'Ok'.