Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres: Difference between revisions
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The green square holds the information on how to correct for the background. In this case we will use the 'Shirley' background with default settings. | The green square holds the information on how to correct for the background. In this case we will use the 'Shirley' background with default settings. | ||
Click 'Add Doublet' once and the Si2p doublet will be added. | |||
[[File:XPS-basics14.jpg|700px]] | |||
A table with peak fitting parameters emerge above the spectrum. The Si2p spin-orbit couple is labelled Scan A. The details of the fitting is not discussed here. | |||
Also, in the upper part of the spectrum the residuals of the fitting are shown. | |||
To add the oxide peak, move the centre bar onto the oxide peak (this is why it is a good idea to have both peaks in the same spectrum) - in this case at around 102.8 eV binding energy. | |||
Cick 'Add Doublet' to add the oxide peak. | |||
[[File:XPS-basics15a.jpg|700px]] | |||
Swithc to the other tab labelled 'Fit Peaks' in the 'Peak Fitting' window. Here, a button labelled 'Fit All Levels' will apply the fitting parameters to all levels (supposing several levels are available). Upon completion of the fitting routine, press 'Accept' and 'Ok'. | |||