Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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==Oxidation curves== | ==Oxidation curves== | ||
===A1 Furnace <100>-Si Wet Oxidation=== | ===A1 Furnace <100>-Si Wet Oxidation=== | ||
[[Image: | [[Image:A1_furnace_100_Si_wet_oxidation.jpg]] | ||
===A3 Furnace <100>-Si Wet Oxidation=== | ===A3 Furnace <100>-Si Wet Oxidation=== | ||
[[Image: | [[Image:A3_furnace_100_Si_wet_oxidation.jpg]] | ||