Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 44: | Line 44: | ||
** CSAR | ** CSAR | ||
** ZEP | ** ZEP | ||
*** PMMA/MMA | |||
** HSQ (FOx) | ** HSQ (FOx) | ||
**AZ 5214E resist | **AZ 5214E resist | ||
| Line 44: | Line 44: | ||
** CSAR | ** CSAR | ||
** ZEP | ** ZEP | ||
*** PMMA/MMA | |||
** HSQ (FOx) | ** HSQ (FOx) | ||
**AZ 5214E resist | **AZ 5214E resist | ||