Specific Process Knowledge/Characterization/XPS/Processing: Difference between revisions
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* U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\ | * U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\ | ||
and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click [mailto:support.service.ukegr@thermofisher.com?Subject=Standard%20processing%20license%20for%20computer%20number%20xxx%20-%20xxx%20-%20xxx here]) requsting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data. | and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click [mailto:support.service.ukegr@thermofisher.com?Subject=Standard%20processing%20license%20for%20computer%20number%20xxx%20-%20xxx%20-%20xxx here]) requsting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data. | ||
== How to analyze data == | |||
In this section, all steps (import data, add peaks and backgrounds etc.)of the analysis are described. | |||
=== XPS Knowledge View === | |||
A knowledge database has been added to the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview|here]] to access XPS Knowledge View. | |||
=== Basic instructions === | |||
== Examples of data analysis == | == Examples of data analysis == | ||
*[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]] | *[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]] | ||