Jump to content

Specific Process Knowledge/Characterization/XPS/Processing: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
Line 9: Line 9:
* U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\
* U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\
and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click [mailto:support.service.ukegr@thermofisher.com?Subject=Standard%20processing%20license%20for%20computer%20number%20xxx%20-%20xxx%20-%20xxx here]) requsting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data.
and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click [mailto:support.service.ukegr@thermofisher.com?Subject=Standard%20processing%20license%20for%20computer%20number%20xxx%20-%20xxx%20-%20xxx here]) requsting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data.
== How to analyze data ==
In this section, all steps (import data, add peaks and backgrounds etc.)of the analysis are described.
=== XPS Knowledge View ===
A knowledge database has been added to the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview|here]] to access XPS Knowledge View.
=== Basic instructions ===


== Examples of data analysis ==
== Examples of data analysis ==


*[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]]
*[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]]