Specific Process Knowledge/Characterization/XPS/Processing: Difference between revisions
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== Install Avantage == | == Install Avantage == | ||
To install Avantage, please download the latest version (175 Mb zip file)from the network drive | To install Avantage, please download the latest version (175 Mb zip file) from the network drive | ||
* O:\CleanroomDrive\jml\XPS Avantage 5.948\ | * O:\CleanroomDrive\jml\XPS Avantage 5.948\ | ||
* U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\ | * U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\ | ||
and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click [mailto:support.service.ukegr@thermofisher.com?Subject=Standard%20processing%20license%20for%20computer%20number%20xxx%20-%20xxx%20-%20xxx here]. | and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click [mailto:support.service.ukegr@thermofisher.com?Subject=Standard%20processing%20license%20for%20computer%20number%20xxx%20-%20xxx%20-%20xxx here]) requsting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data. | ||
== Examples of data analysis == | |||
*[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]] | *[[Specific Process Knowledge/Characterization/XPS/Processing/SiliconSandwich|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]] | ||
Revision as of 08:38, 8 September 2015
XPS data processing
You will need some kind of dedicated software in order to analyze and interpret XPS spectra. You can find many online but here we will only use the Avantage for obvious reasons. Installing it on your own PC is strongly adviced as the analysis may be time consuming.
Install Avantage
To install Avantage, please download the latest version (175 Mb zip file) from the network drive
- O:\CleanroomDrive\jml\XPS Avantage 5.948\
- U:\DCH\CleanroomDrive\jml\XPS Avantage 5.948\
and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( Click here) requsting a standard processing license. Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data.