Specific Process Knowledge/Wafer cleaning/IMEC: Difference between revisions
| Line 27: | Line 27: | ||
(a yellow and a black spot) | (a yellow and a black spot) | ||
|Clean tank (cleanroom 4, 7-up bath for wafers) and make your own or make in dedicated glass. | |Clean tank (cleanroom 4, 7-up bath for wafers) and make your own or make in dedicated glass. | ||
Pour up H<math>_2</math>SO<math>_4</math> first, put wafers in carrier (USE this in | Pour up H<math>_2</math>SO<math>_4</math> first, put wafers in carrier (USE this in steps 2-7), add H<math>_2</math>O<math>_2</math>, wait 30 sec, dip wafers. | ||
|Maybe clean the tank the day before! | |Maybe clean the tank the day before! | ||
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