Specific Process Knowledge/Characterization/XPS/XPS technique: Difference between revisions

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	; Detection in the analyzer		; Detection in the analyzer
	: In the analyzer the electrons are separated according to the kinetic energy by two concentric spheres held at some potential. By playing on the acceptance angle of the entrance/exit slits of the analyzer one can tune the energy resolution with the parameter called pass energy. Subsequently detected by the spectrometer, the number of electrons may be plotted as a function of energy thus making up an XPS spectrum.		: In the analyzer the electrons are separated according to the kinetic energy by two concentric spheres held at some potential. By playing on the acceptance angle of the entrance/exit slits of the analyzer one can tune the energy resolution with the parameter called the pass energy. Subsequently detected by the spectrometer, the number of electrons may be plotted as a function of energy thus making up an XPS spectrum.