Specific Process Knowledge/Wafer cleaning/IMEC: Difference between revisions
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===IMEC process for cleaning of wafers before fusion bonding:=== | ===IMEC process for cleaning of wafers before fusion bonding:=== | ||
Based on the IMEC clean process: M. Meuris et al. "The IMEC clean: A new concept for particle and metal removal on Si surfaces.", Solid state Technology, Vol. 38, Issue 7, pp 109-113, 1995. <br \> | Based on the IMEC clean process: ''M. Meuris et al. "The IMEC clean: A new concept for particle and metal removal on Si surfaces.", Solid state Technology, Vol. 38, Issue 7, pp 109-113, 1995.'' <br \> | ||
Has been modified by Karen Birkelund @DTU Nanotek. | Has been modified by Karen Birkelund @DTU Nanotek. | ||