Specific Process Knowledge/Characterization/XPS/XPS technique: Difference between revisions
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; Generation of photoelectrons | ; Generation of photoelectrons | ||
: As the incoming and monochromatic X-rays (with energy E<sub>phot</sub>) impinge on and travel through the sample, they may react with electrons bound to atoms in the sample with a certain binding energy (E<sub>bind</sub>). The result is free electron inside sample with kinetic energy E<sub>kin</sub>=E<sub>phot</sub>-E<sub>bind</sub>. | : As the incoming and monochromatic X-rays (with energy E<sub>phot</sub>) impinge on and travel through the sample, they may react with electrons bound to atoms in the sample with a certain binding energy (E<sub>bind</sub>). The result is free electron inside sample with a kinetic energy (E<sub>kin</sub>=E<sub>phot</sub>-E<sub>bind</sub>) that is characteristic of the atomic level it originated from. The small energy changes in the electronic levels in the sample atoms induced by the formation of chemical bonds are also detectable by the XPS | ||
== X-ray Photoelectron Spectroscopy analysis (XPS) == | == X-ray Photoelectron Spectroscopy analysis (XPS) == | ||
Since the energy of the incoming photons is known, and the energy of the ejected electrons is measured, the binding energy of the electrons in the probed atoms can be determined. The binding energy of the electrons are element specific, and is therefore a "finger-print" of the atom. Hence, a measurement of the XPS spectrum gives information of which materials are present in the sample, and at which concentrations. | Since the energy of the incoming photons is known, and the energy of the ejected electrons is measured, the binding energy of the electrons in the probed atoms can be determined. The binding energy of the electrons are element specific, and is therefore a "finger-print" of the atom. Hence, a measurement of the XPS spectrum gives information of which materials are present in the sample, and at which concentrations. | ||