Specific Process Knowledge/Characterization/XPS/XPS technique: Difference between revisions
| Line 8: | Line 8: | ||
XPS is a surface sensitive and non destructive technique used for analysis of the elemental composition. The basic principle is shown below. | XPS is a surface sensitive and non destructive technique used for analysis of the elemental composition. The basic principle is shown below. | ||
[[File:800px-XPS_PHYSICS.jpg| | [[File:800px-XPS_PHYSICS.jpg|700px| XPS principle (Image taken from Wikipedia)]] | ||
In the XPS spectrometer system the probed samples are irradiated by photons with a specific energy, and the photoelectrons that leaves the sample are detected. The energy levels of the electrons are elemental specific, and by measuring the energy of the outgoing electrons, it is possible to detect which elements that are present in a sample. | In the XPS spectrometer system the probed samples are irradiated by photons with a specific energy, and the photoelectrons that leaves the sample are detected. The energy levels of the electrons are elemental specific, and by measuring the energy of the outgoing electrons, it is possible to detect which elements that are present in a sample. | ||