Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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== Comparison of EDX, SIMS and XPS == | == Comparison of EDX, SIMS and XPS == | ||
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!width="100" style="background:silver; color:black" | | !width="100" style="background:silver; color:black" | | ||
!width="250" style="background:silver; color:black" | SEM with EDX | !width="250" style="background:silver; color:black" | SEM with EDX | ||
!width="250" style="background:silver; color:black" | SIMS | !width="250" style="background:silver; color:black" | [[Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry#Atomika_SIMS|Atomika SIMS]] | ||
!width="250" style="background:silver; color:black" | XPS (or ESCA) | !width="250" style="background:silver; color:black" | [[Process Knowledge/Characterization/XPS#XPS-ThermoScientific|XPS]] (or ESCA) | ||
|- valign="top" | |- valign="top" | ||
! style="background:WhiteSmoke; color:black" width="60" | Full name | ! style="background:WhiteSmoke; color:black" width="60" | Full name | ||