Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
No edit summary |
|||
| Line 9: | Line 9: | ||
* SIMS | * SIMS | ||
* XPS (ESCA) | * XPS (ESCA) | ||
In the table below the three techniques are compared | |||
== Comparison of EDX, SIMS and XPS == | == Comparison of EDX, SIMS and XPS == | ||
| Line 142: | Line 136: | ||
** See what effect a surface treatment of your sample has on the surface chemistry. | ** See what effect a surface treatment of your sample has on the surface chemistry. | ||
** Check a polymer covered surface. Are for example (C=O), (C-OH) (C-C) groups present in the polymer after it been deposited on a surface. | ** Check a polymer covered surface. Are for example (C=O), (C-OH) (C-C) groups present in the polymer after it been deposited on a surface. | ||
You can make detailed analysis on the elemental composition and distribution in a sample with 4 instruments at Danchip. The | |||
[[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/Leo|Leo SEM]] and | |||
[[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/FEI|FEI SEM]] are both equipped with an X-ray detector that allows you to make elemental analysis by using the technique Energy Dispersive X-ray analysis or EDX. The | |||
[[Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry|Atomika SIMS]] uses a technique called Secondary Ion Mass Spectrometry or SIMS. The | |||
[[Specific Process Knowledge/Characterization/XPS|XPS-ThermoScientific]] can be used for X-ray Photoelectron Spectroscopy measurements. | |||