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Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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Revision as of 09:50, 31 August 2015
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Jmli
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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Element analysis at Danchip
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Revision as of 09:52, 31 August 2015
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Jmli
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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Element analysis at Danchip
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Line 9:
Line 9:
* SIMS
* SIMS
* XPS (ESCA)
* XPS (ESCA)
The |[[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/Supra60VP|SEM Supra 60VP]] is equipped with an EDX detector that
