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===IMEC process for cleaning of wafers before fusion bonding:===
===IMEC process for cleaning of wafers before fusion bonding:===


''Ophav IMEC
Based on the IMEC clean process: M. Meuris et al. "The IMEC clean: A new concept for particle and metal removal on Si surfaces.", Solid state Technology, Vol. 38, Issue 7, pp 109-113, 1995. <br \>
Spørg Karen om der er lavet modificeringer''
Has been modified by Karen Birkelund @DTU Nanotek.


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