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== Detailed descriptions of subprograms ==
= Detailed descriptions of subprograms =
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=== SFOCUS ===
== SFOCUS ==
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=== PDEFBE ===
== PDEFBE ==
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The most important output of PDEFBE is the gain shift value which is 1.4 nm (in Y); the maximum allowable gain correction in this condition file (0.2nA ap5) is 6 nm. If PDEFBE did not reach a shift value below 6 nm within 3 retries for this condition file, the scan position on the BE mark should be shifted or a new BE mark should be used instead.
The most important output of PDEFBE is the gain shift value which is 1.4 nm (in Y); the maximum allowable gain correction in this condition file (0.2nA ap5) is 6 nm. If PDEFBE did not reach a shift value below 6 nm within 3 retries for this condition file, the scan position on the BE mark should be shifted or a new BE mark should be used instead.


=== DISTMEM and DISTBE ===
== DISTMEM and DISTBE ==
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=== SUBDEFBE ===
== SUBDEFBE ==
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The machines measures over a field specified in the subprogram but no larger than the main field size (4 µm x 4 µm).
The machines measures over a field specified in the subprogram but no larger than the main field size (4 µm x 4 µm).


=== DRIFT ===
== DRIFT ==
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=== HEIMAP ===
== HEIMAP ==
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===SETWFR===
==SETWFR==
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= Troubleshooting =
= Troubleshooting =
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