Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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From the EBX menu on workspace 1, open the calibration window ‘Clb’. From this window, a previously used condition file (calibration file) dedicated to a certain aperture setting and current setting is loaded, re-calibrated, and saved again. | From the EBX menu on workspace 1, open the calibration window ‘Clb’. From this window, a previously used condition file (calibration file) dedicated to a certain aperture setting and current setting is loaded, re-calibrated, and saved again. | ||
Calibration of condition files normally consists of a | Calibration of condition files normally consists of a number of subprograms listed in the table below. The subprograms listed in the blue part of the table are a part of the 'daily' batch of programs. | ||
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