Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
| Line 74: | Line 74: | ||
Authorized users are allowed to unload a cassette from the robot loader (autoloader) and mount their substrate but '''not''' allowed to load the cassette into the loader after mount. | Authorized users are allowed to unload a cassette from the robot loader (autoloader) and mount their substrate but '''not''' allowed to load the cassette into the loader after mount. | ||
We have one chip cassette, 2 2" cassettes, 2 4" cassettes, many 6" cassettes and 1 8" cassette. Some cassettes are made of Aluminum, others of Titanium. The thermal expansion coefficient of Ti is much lower than of Al; | We have one chip cassette, 2 2" cassettes, 2 4" cassettes, many 6" cassettes and 1 8" cassette. Some cassettes are made of Aluminum, others of Titanium. The thermal expansion coefficient of Ti is much lower than of Al; if the temperature difference of the cassette itself and the stage of the e-beam writer is lagre (> 0.1 degree), the expansion/compression during writing might be too large for critical patterns. | ||
'''Keep''' an eye on the wafer orientation when you mount; the 2" aluminum cassette still have wafer orientation flat-up. | '''Keep''' an eye on the wafer orientation when you mount; the 2" aluminum cassette still have wafer orientation flat-up. | ||