Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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View the v30-file and make sure all variations have been converted correctly. | View the v30-file and make sure all variations have been converted correctly. | ||
In the jdf-file, manually create a shot modulation (similar to the jdi-file created by PEC) that fits to the number of layers in your v30-file. This shot modulation should be defined in the end of the jdf-file (see the sdf- and jdf-file manual). In the example below, the | In the jdf-file, manually create a shot modulation (similar to the jdi-file created by PEC) that fits to the number of layers in your v30-file. This shot modulation should be defined in the end of the jdf-file (see the sdf- and jdf-file manual). In the example below, the three layers (green, blue and red in the BEAMER viewer to the right) are defined to have shot modulation from -20 % to + 20 % of the base-dose: | ||
<br clear="all" /> | <br clear="all" /> | ||
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STDCUR 0.22 ;nA | STDCUR 0.22 ;nA | ||
SHOT1: MODULAT (( 0, -20) , ( 1, 0) , ( 2, 20 | SHOT1: MODULAT (( 0, -20) , ( 1, 0) , ( 2, 20)) | ||
END | END | ||