Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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# Prepare your pattern using a layout software (L-edit, CleWin, CAD) and export that to GDS format. Check your GDS-file by importing it in e.g. <span class="plainlinks">[http://www.wieweb.com/ns6/index.html CleWin]</span> or L-edit. In order to reach the files from the computers inside the cleanroom it is recommended to either dropbox them or send them per email to yourself. | # Prepare your pattern using a layout software (L-edit, CleWin, CAD) and export that to GDS format. Check your GDS-file by importing it in e.g. <span class="plainlinks">[http://www.wieweb.com/ns6/index.html CleWin]</span> or L-edit. In order to reach the files from the computers inside the cleanroom it is recommended to either dropbox them or send them per email to yourself. | ||
# Convert the GDS file to v30 using BEAMER; a manual for BEAMER software is found | # Convert the GDS file to v30 using BEAMER; a manual for BEAMER software is found [Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER|here] | ||
'''Create sdf and jdf-files:''' | '''Create sdf and jdf-files:''' | ||